Low-Pressure Plasma System


General info

Manufacturer:diener electronic
Model:ZEPTO-B
Facility:Chair of Materials Science and Nanotechnology
Partner:TU Dresden
Location:MBZ 414

Technical specs

Generator:
40 kHz, 0-100 W

Vacuum Chamber:
Round
Borosilicate glass
105 mm in diameter
Length: 300 mm
Volume: 2.6 L

Gas Supply
Air

Low-Pressure Plasma System


General info

Manufacturer:diener electronic
Model:ZEPTO-B
Facility:Chair of Materials Science and Nanotechnology
Partner:TU Dresden
Location:MBZ 414

Technical specs

Generator:
40 kHz, 0-100 W

Vacuum Chamber:
Round
Borosilicate glass
105 mm in diameter
Length: 300 mm
Volume: 2.6 L

Gas Supply
Air