Due to ease of fabrication of arbitrary structures with high specificity as well as the “direct” writing of the desired pattern on the substrate, electron-beam lithography (EBL) has attracted significant attention and the micro-/nanopatterned surfaces generated by this technique are excellent candidates to be integrated into solid-state devices such as biosensors. Compared to traditional photolithography, EBL does not suffer from the drawbacks of conventional methods such as roughness generation during the etching step, long processing times, or resist/film adhesion and can achieve much better resolutions due to an extremely short wavelength of the electron beam (0.2-0.5 Å). This method is a versatile and straightforward tool to fabricate nanoscale features that meet the requirements of nanophotonic studies.
Degradation Behavior of Coated Metallic Stents: Influence of In Vitro Fluid-Dynamic Biostability Testing Conditions
Mimicking on-water surface synthesis through micellar interfaces
Structural changes in Ge1-xSnx and Si1-x-yGeySnx thin films on SOI substrates treated by pulse laser annealing
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On-Water Surface Synthesis of Vinylene-Linked Cationic Two-Dimensional Polymer Films as the Anion-Selective Electrode Coating
Due to ease of fabrication of arbitrary structures with high specificity as well as the “direct” writing of the desired pattern on the substrate, electron-beam lithography (EBL) has attracted significant attention and the micro-/nanopatterned surfaces generated by this technique are excellent candidates to be integrated into solid-state devices such as biosensors. Compared to traditional photolithography, EBL does not suffer from the drawbacks of conventional methods such as roughness generation during the etching step, long processing times, or resist/film adhesion and can achieve much better resolutions due to an extremely short wavelength of the electron beam (0.2-0.5 Å). This method is a versatile and straightforward tool to fabricate nanoscale features that meet the requirements of nanophotonic studies.
Degradation Behavior of Coated Metallic Stents: Influence of In Vitro Fluid-Dynamic Biostability Testing Conditions
Mimicking on-water surface synthesis through micellar interfaces
Structural changes in Ge1-xSnx and Si1-x-yGeySnx thin films on SOI substrates treated by pulse laser annealing
Go to Journal Cover
On-Water Surface Synthesis of Vinylene-Linked Cationic Two-Dimensional Polymer Films as the Anion-Selective Electrode Coating
